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ADS5424-SP: Is the ADS5424 die fully planar with no oxide steps?

Prodigy 30 points

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Part Number: ADS5424-SP

We’re doing a DPA on a 5962-0720601VXC (ADS5424MHFG-V).  Per MIL-STD-883, TM 2018, SEM is not required for planar die. Is the die in the 5962-0720601VXC fully planar with no oxide steps? Or is SEM required?