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Attempt to start debugger yields primary document cannot be openned

I am running the latest version of CCS debugging/designing to the Hercules RM48L952ZWT. I set up the ccxml document, which tested fine. I then added in my software, which connection tests successfully. I pressed F11 to start the debug mode, but receive the following error:

Cannot read System Setup data from XML file C:\SoftDev\TIWORK~1\CCMv3\Versions\Current\CCMv3\TARGET~1\RM48L9~1.CCX
Error parsing file:
Fatal Error at (0, 0): An exception occurred! Type:RuntimeException, Message:The primary document entity could not be opened. Id=C:\SoftDev\TIWORK~1\CCMv3\Versions\Current\CCMv3\TARGET~1\RM48L9~1.CCX

I copied the shortened path above to a terminal window and do see the file.

What can the problem be?