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Linux/DLP3010: how can i fix the error 'Can not execute binary file: Exec format error'

Part Number: DLP3010

Tool/software: Linux

I installed jetpack on nvidia tx2 27.1version.

From the 'www.ti.com/.../DLPLIGHTCRAFTER site'

I have downloaded 'DLP LightCrafter Firmware and Software Bundle Linux.'

I unzipped and ran the run file.

But the following error message appears.

Can not execute binary file: Exec format error

I searched Google for the following error message:

When I tried the search results, I changed the file permissions and tried to execute it.

For example, chmod.

But the error still exists.

The Ubuntu version I use is that

uname -m


uname -a

Linux tegra-ubuntu 4.4.15-tegra # 1 SMP PREEMPT ... aarch64 aarch64 is GNU / Linux.

How can i fix the error?