DRV8320: VM PIN burning problem

Part Number: DRV8320

Hi,

I am making circuits using DRV 8320 RS, The phenomenon that the VM PIN burns occurs.

・When loading the motor, apply current of 100A or more to the FET.
・Buck Regulator(LMR16006X) is not broken.
・There are also many circuits that will not break(VM).
I would like advice if this is the reason why this phenomenon happens.

I attach an image.

Best Regards,

Takashi Mito

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