Other Parts Discussed in Thread: DLP9500UV, DLP9500
I am looking into building a digital lithography system with micron-scale feature sizes and had a few questions about this product. The DLPLCR95UVEVM evaluation module seemed best suited to this application but please let me know if there is a product that may be better for me.
1. What feature sizes can this model typically achieve?
2. The datasheet for the DLP9500UV lists optical power limits for wavelengths beyond the recommended operating range of 363-400nm. Does this mean the mirror also functions in wavelengths outside this range or are those mentioned to account for broadband sources?
3. I've noticed that some DLP chips list the max optical power density as being "thermally limited." Does this mean the mirrors can sustain any power density of incident light in these wavelengths until they heat beyond their operating point?
Thank you very much for your help.