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Gap length between two mirrors of DMD

Other Parts Discussed in Thread: DLP5500, DLP4500, DLP3010

Hello ALC team,

 

We would like to know the specification of the DMD mirror gap.

 

Is it possible to provide any information about the gap between each mirrors and the length between mirror and silicon substrate? Please see the following figure and would you please tell us these values for DLP3000, DLP4500 and DLP5500?

 

Best Regards,

Nobu Arai