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DLPLCR95UVEVM: Operating Wavelengths and Optical Power Limits

Alec Skipper
Prodigy 20 points
Part Number: DLPLCR95UVEVM
Other Parts Discussed in Thread: DLP9500UV, DLP9500

I am looking into building a digital lithography system with micron-scale feature sizes and had a few questions about this product. The DLPLCR95UVEVM evaluation module seemed best suited to this application but please let me know if there is a product that may be better for me.
 
1. What feature sizes can this model typically achieve?
2. The datasheet for the DLP9500UV lists optical power limits for wavelengths beyond the recommended operating range of 363-400nm. Does this mean the mirror also functions in wavelengths outside this range or are those mentioned to account for broadband sources?
3. I've noticed that some DLP chips list the max optical power density as being "thermally limited." Does this mean the mirrors can sustain any power density of incident light in these wavelengths until they heat beyond their operating point?

Thank you very much for your help.

  • 0
    TI__Expert 4530 points
    Hi Alec,

    Welcome to DLP section of TI E2E community. I will get back to you soon.

    -ykc
  • 0
    TI__Intellectual 1815 points
    Alec

    Can you provide more information about your intended design? Items like, desired feature sizes or line space targets, Optical wavelengths, effective power per pixel at the exposure surface?

    We have many DMD options for maskless lithography
    for designs using wavelenths above 400 nm
    DLP6500BFQL
    DLP7000BFLP
    DLP9500BFLN
    DLP9000XFLS

    For designs needing to operate with wavelengths between 363 - 420 nm
    DLP7000UVFLP
    DLP9500UVFLN

    1. If you look at app note System Design Considerations Using TI DLP® Technology in UVA (363 – 420 nm) System Design Considerations Using TI DLP® Technology in UVA (363 – 420 nm) it covers many of the details when using TI DLP technology for lithography systems. Sub 1 um line space systems are regularly achieved with DLP9500(UV) DMD systems.

    2. The DMD micro mirrors have reflectivity that closely matches Aluminum. The optical efficiency of the DMD is typically limited by the pass band of the DMD window - see App Note Wavelength Transmittance Considerations for DLP DMD Windows (Rev. D) www.ti.com/.../dlpa031

    3. Yes in optical regions that max optical power is listed as ""thermally limited" as long as the design implementation adequate cools the DMD case and Array with in the data sheet limits any amount of optical power can be used.
  • 0 in reply to Carey Ritchey
    Prodigy 20 points
    Thank you Carey, this helps a lot. We are targeting feature sizes of ~1-2 microns with an exposure wavelength of 365nm so the DLP9500UV should be perfect.