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LM117: LM117

Part Number: LM117
Other Parts Discussed in Thread: TPS7A4501-SP

We’re doing a DPA on the parts listed below.  Per MIL-STD-883, TM 2018, SEM is not required for planar die.  Is the die fully planar with no oxide steps?  Are chemical mechanical polish (CMP) processes used?  Or is SEM required?

5962-1222402VHA (TPS7A4501-SP)

5962R9951707VZA (LM117GWRLQMLV)