my schematic and layout as following picture, and i don't know what cause the Q3 broken(source and drain been shorted) .
I tested the output without load , the output is 5.4V with 50mVp-p.
I added a load of 1R then after seconds I saw smoke coming out, then check the circuit and found Q3(CSD18501Q5A) was broken.
(Other: I choose 2.2uH when design but there is only 15uH when I debug so I use it instead.)
So my question is what cause the Q3's broken and what can I do next for my 5V0@10A circuit? Thank you for your reply.