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LDC1312: Pls recommend a distance sensing solution

Part Number: LDC1312

Hi TI Community experts,

I want to measure a sensor distance from my machine, the maximum distance is 10 cm, I need a 0.2~0.3 mm accuracy.

I am not sure if below method are suitable for my application: inductive sensing, capacitive sensing, ultrasonic sensing, laser ranging sensing?

Can you recommend the suitable sensing solutions and related device as well as reference design? If possible, pls recommend several different sensing method  and I can discuss with my team.

Appreciate your help and thank you!

Rachel