Dear Sirs,
My customer asked us about Target substrate tilt vs accuracy for LDC1314.
As a condition of their use, the substrate on which the target is mounted may be inclined by about 0.3 mm with respect to the sensor substrate.
For this reason, they think that they have to take some measures.
Therefore, they asked us for data on the accuracy (tilt vs. accuracy) when the substrate on which the target was mounted was tilted.
Please let us know if you have the data for the slope vs. accuracy.
Also, please tell us if you have any advice or measures to suppress the deterioration of the accuracy of the angle to the tilt of the substrate on which the target is mounted.
Best Regards,
Y.Hasebe