MEMS Samples for Measurement

Joshua Wiersma

Hello, I'm looking to measure some MEMS samples that have features less than 30 microns and no cover glass. They do not need to be working.

Thanks,

Josh

over 13 years ago

0 Pascal DLP over 13 years ago

TI__Genius 9935 points

Josh,

Welcome to the TI DLP & MEMS E2E forum.

Could you tell me more about your project? What are you hoping to find through this effort?

Best regards,

Pascal

0 Joshua Wiersma over 13 years ago in reply to Pascal DLP

Prodigy 30 points

I'm doing dissertation research on interference microscopy techniques and need some samples to validate my methods.

0 Pascal DLP over 13 years ago in reply to Joshua Wiersma

TI__Genius 9935 points

Josh,

Thanks for the quick answer. That sounds like an interesting project.

My suggestion is that you find a worn-out or out-of-service DLP projector and remove the DMD (the DLP mircro mirror device). We can not provide sample DMDs, especially de-windowed ones. I will caution you that if you remove the window, the DMD is completely useless except to look at - carefully. The exposed mirror array is very fragile. You should not touch it with anything - or you will wipe away the MEMs structure. In any event, the mirrors will be mostly flat (unactivated state) and you will not be able to activate them to tilt them to either of the active states (+/- 12 degree tilt).

Best regards,

Pascal

0 Joshua Wiersma over 13 years ago in reply to Pascal DLP

Prodigy 30 points

Ok, thanks!

0 AndyL over 10 years ago in reply to Pascal DLP

Prodigy 80 points

Hi Pascal,

Any reason why you said that the DMD is completely useless with the window removed? Suppose the window was removed in a cleanroom environment, will the mirrors not be active at all?

0 Sanjeev over 10 years ago in reply to AndyL

TI__Mastermind 30875 points

Hello Andy,

There is lucubration element inside the DMD that will keep mirrors working for long time. It gets damaged once the top window is opened. You can read article from this link http://focus.ti.com/download/dlpdmd/141_hornbeck.pdf section 2.5 DMD reliability.

Regards,

Sanjeev

0 AndyL over 10 years ago in reply to Sanjeev

Prodigy 80 points

Sanjeev said:

Hello Andy,

There is lucubration element inside the DMD that will keep mirrors working for long time. It gets damaged once the top window is opened. You can read article from this link http://focus.ti.com/download/dlpdmd/141_hornbeck.pdf section 2.5 DMD reliability.

Regards,

Sanjeev

Hi Sanjeev, thank you for the reply. I'd appreciate if you could continue the discussion in a new topic that I started with regard to DMD cover glass removal: http://e2e.ti.com/support/dlp__mems_micro-electro-mechanical_systems/f/94/p/384461/1355838.aspx

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MEMS Samples for Measurement