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DLP650LNIR: What is the accuracy of each micromirror?

Part Number: DLP650LNIR

Hi there,

We need a data sheet showing the accuracy of either the individual mirror or the entire mirror array. That is to say, we need the uncertainty in micromirror pitch size (10.8 um) or the mirror active array width (13.824 mm)

  • Hello Jiapeng,

    I do not know if the tolerances are published for active array sizes. I will check, but I know they have to be quite small for the wafer manufacturing to work.

    Fizix

  • Hello again Jiapeng,

    I got back information from the DMD team.  This information is considered proprietary and that is why it is not part of the ICD at the end of the data sheet.

    Can I ask what the concern is?  the process is very tightly controlled so that the variation in pixel pitch is very small.

    Fizix

  • Dear Fizix,

    Thanks for your help. One of our research paper is under review. One referee asks us to provide some support documents to make sure that the mirror size we use for the calculation is reliable. Could you please ask the DMD team to do me a favor? We don't need an exact number of uncertainty in mirror size. A rough estimation would be good. For example, few nanometers or few tens of nanometers?

    Appreciate your help!

    Best regards,

  • I have asked if we have a ballpark figure.  It will have to be after the weekend.

  • Hello again Jiapeng,

    Again, this information is considered very sensitive and we do not share this with any customer.  This information has been accepted in the industry for a very long time is so small that it is not of concern to any of our customers.

    If your referee still pushes on this please "friend" me.

    Fizix

  • Dear Fizix,

    Thanks for your explanation. May I have your email address so that I can tell the referee to contact you if they insist on pursuing this number?

    Best regards,

    Jiapeng

  • Jiapeng,

    I have sent a friend request to you.

    Fizix