TPS50601A-SP: TPS50601A

Michael Harmeyer

Part Number: TPS50601A-SP

We’re doing a DPA on a 5962R1022102VSC (TPS50601A-RHA). Per MIL-STD-883, TM 2018, SEM is not required for planar die. Is the die in the 5962R1022102VSC fully planar with no oxide steps? Are chemical mechanical polish (CMP) processes used? Or is SEM required?

Thanks,

over 3 years ago

0 Christian Yots over 3 years ago

TI__Genius 14540 points

Hi,

Let me check with our quality engineer on these questions. I'll let you know once I hear back from him.

Thanks

Christian

0 Michael Harmeyer over 3 years ago

Prodigy 230 points

Anything yet?

0 Christian Yots over 3 years ago in reply to Michael Harmeyer

TI__Genius 14540 points

HI Michael,

The quality engineer referred me to a process engineer - I just pinged this person again- I'll let you know once I hear something back. Thanks, Christian

0 Michael Harmeyer over 3 years ago in reply to Christian Yots

Prodigy 230 points

Anything yet?

0 Christian Yots over 3 years ago in reply to Michael Harmeyer

TI__Genius 14540 points

Hi Michael,

I apologize for the delay. I received the following feedback from our process/quality engineer:

"CMP is in all Metal levels and there should be no oxide steps for the metallization. So far we still perform cross sections and inline checks."

Thanks

Christian

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TPS50601A-SP: TPS50601A