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LMR36506-Q1: About Flip Chip(SolderBump-CuPillar) products

Part Number: LMR36506-Q1

Tool/software:

VQFN-HR packages such as the LMR36506MSCQRPERQ1 use a Flip Chip (Solder Bump-Cu Pillar) structure.
Since when has this technology been mass-produced by TI?
What is the total production volume achieved so far?