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metal contact to GaN LED wafer

I have a question about metal contacts on GaN LED wafers, I'd appreciate if anyone could help me.

I have bought a 4-inch GaN LED wafer and I can turn it on at the probe tip point but when I deposit a Ni/Au (or Ti/Au) layer on the wafer using a shadow mask, it does not turn on. What am I missing here? What a probe tip contact has that my metal layer doesn't?