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FDC1004EVM:Technical Inquiry

Part Number: FDC1004EVM

Tool/software:

Hello,

Our company is developing a semiconductor wafer transfer robot and would like to use the FDC1004EVM sensor to detect contact and measure distances of wafers. Accordingly, we would like to request information on the sensor's operating principle and response characteristics, robot operation, how to use the Sensing Solutions EVM GUI tool, and the test procedure.

In particular, we are considering the following:

Sensor's operating principle: Detailed information on the FDC1004EVM sensor's capacitive sensing method and distance measurement capability.

Response characteristics: Information on the sensor's response to surfaces of various materials and thicknesses.

Robot's operation: Experimental methods for changes in the sensor's measurement values according to the robot's movement.

Usage of the GUI tool: How to use the Sensing Solutions EVM GUI tool to collect and analyze sensor data.

Test procedure: Specific procedures for distance measurement and response testing.

Please also recommend research materials, technical blogs, and papers related to this. They will be of great help to our research.

Thank you.