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ldc1000 burns

I have two burned ldc1000 chips used in my designed PCB. The last one burned today, it worked for few days, but not as well as it did on evaluation kit. I found signs that chip didn't worked properly, recordings showed that frequency data was always constant, responsive proximity, but had some glitches. I started checking my pcb with multimeter, found that the 5V power pin was shorted to GND (6 ohms resistance) by chip, i verified that by soldering chip out and checking continuity directly on chip. I think its the sign that analog circuitry burned.

I thought that Rp_Min setting should prevent LC tank from over current.

Can wrong settings caused the damage of chip? Or i should look for layout mistakes, but where I should i start?