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Looking for a device that can measure small capacitance signal (0-10 pF)

Other Parts Discussed in Thread: FDC2214, FDC2212, FDC1004, FDC2214EVM, FDC1004EVM, FDC1004QEVM, FDC2114EVM

Hello,

My major is thermal science and I am not very familiar to electrical knowledge. I am looking for a device that can measure small capacitance and could you please help tell me which device is suitable? Thank you in advance! 

Here are some details:

Measure capacitance range: 0-10 pF;

Eliminated the effects of all stray capacitance including those of switches;

Low baseline drift, maybe have a differential structure;

The frequency near 1-2 MHz (we want to measure small capacitance and eliminate the influence of conductivity of structures);

High resolution: 0.001 pF

 

Could you please give us some suggestions about choosing a suitable device? Is FDC2212, FDC2214 or FDC1004 suitable for us? Thank you in advance!