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FDC2214EVM: Non-monotonous capacitance vs. distance behavior

Part Number: FDC2214EVM

Hello,

The figure attached shows the capacitance measured as a function of  the distance between the ground plate and the sensor plate attached to FDC2214EVM.

While capacitance increases with decreasing distance, there is this "knee" around 10 mm separation point.

I've repeated tests with various currents and different size plates and this non-monotonous behavior persists, with knee appearing at different distance marks.

Shouldn't capacitance just follow C~1/d relationship?

Could you please explain why is it like that and if there are any ways to fix it?

Thank you,

Alex

  

vacation