Capacitance measurements with capdac disabled and capdac =0 are quite accurate. A 10pF capacitance can be measure within 0.2pF consistently.
Keep CAPDAC disabled. Change capdac to 13: result: reading increases by 0.3 pF.
connect known value or 0 capacitance.
Run EVM, take reading with capdac off, value 0.
Increase capdac to different value -> reading will change by 0.2-0.3pF
Make capdac value 0 (integer count 0), then turn capdac on -> cap reading will change by +0.2 to 1.5pF.