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FDC2214: How to solve the decreasing capacitance value, while the capacitance is actually increasing?

Part Number: FDC2214

Dear experts,

I have some concerns about the accurate use of FDC 2214.

We are measuring the signal of the capacitive touch sensor.

A problem is that when the sensor is stimulated, the measured cap value is slightly decreasing at the initial stage of the stimulation.

This seems to be undesirable because the actual cap value of it, that measured by a high precision LCR meter, is increasing.

For this case, is the inappropriate selection of the cap / inductor value at the L-C tank may cause this kind of problem?

If not, is there any other reason for this issue?

Thank you so much for your attention in advance.

Best regards,