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CCS/CC2640R2F: Error connecting to the target

Part Number: CC2640R2F

Tool/software: Code Composer Studio

Hi team

I got this error, what I can do to fix it? I can confirm my .ccxml file is correct, as it was working before. And I have compared the two files. Don't think it's my hardware's problem, as I have this same error without hardware connected. 

I think it has something to do with the XDS110 firmware upgrade. it seems to stop working after the firmware upgrade.

my CCS version: 10.0.0.00010 

I have also tried v9.3 and v9.2.

Thanks team!