TUSB1002AEVM: Technical Process

Part Number: TUSB1002AEVM

What was the smallest technical process node use to manufacure the TUSB1002AEVM . Jejomar Ildefonso of the Texas Instruments | Customer Support Center suggested I direct this question to this E2E forum support form.  Specifically,  what was the smallest processing node used to produce these high speed BiCMOS devices. Additionally Jejomar suggested I asked for the smallest processing nodes used for the following categories of devices: BiPolar, Power BiCMOS and BiCMOS.