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SNV54LS123W

We’re doing a DPA on a 5962-7603901VFA (SNV54LS123W). Per MIL-STD-883, TM 2018, SEM is not required for planar die. Is the die in the 5962-7603901VFA fully planar with no oxide steps? Or is SEM required?

  • Hey Michael,

    I'll be happy to look into this for you, can you elaborate on what 'DPA' and 'SEM' mean?

  • DPA is Destructive Physical Analysis.  That's where we take perfectly good parts from the lot and destroy them so we can see how well they were built.  The DPA samples are representative of the lot.  If the DPA samples look good, then the rest of the lot must be just as good.

    SEM is Scanning Electron Microscopy.  That's were we look at the step coverage of the metal layers on the die to determine if it has enough current density to function properly.  These die must last up to 10 years in space.

    If the die is planer, then we don't need to spend the money to perform SEM during DPA.

  • Hey Michael,

    Thank you for the clarification, I was able to locate MIL-STD-883 documentation to help me better understand. This device does not use a planar process so SEM will need to be performed.