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CC430F5137: Why is there a high inrush current when the microcontroller start-up?

Part Number: CC430F5137

In my application, I need to measure the current consumption of the mcu (cc430f5137). To measure the current of the mcu. I insert a 10ohm resistor at the Vcc. Then, I connect the power supply to the Vcc and observe the voltage across the resistor so that I =V/10. I found that the current at start-up is around 80mA@1.8V and 200mA @3.3V. It will last for a while and decrease gradually. Below is the picture of the waveform under 1.8V and the diagram of the board.

What may cause such a high current at start-up? Is this normal and how to solve this problem?

Regards