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FDC2112: Displacement sensing for wafer inspection

Shibuya
Intellectual 2985 points
Part Number: FDC2112
Other Parts Discussed in Thread: LDC1612

Hello Team,

Is it possible for FDC to achieve following measurement?

 

*Wafer flatness inspection

 Distance from sensor to wafer 14mm or 25mm

 Resolution 0.1mm

 Sampling rate 150sps

Best regards,

Tetsuro

 

  • 0
    TI__Genius 11340 points

    Hi Tetsuro,

    This won't be easily achievable. The target distance is up to 25mm with 0.1mm resolution, which would require a larger sensor. In order to get an idea of the surface flatness, the sensor would need to move, scan the surface, and look for any deviations. Additionally, the sensor also need to distinguish tilt from flatness or other surface effects of the wafer. It may be possible, but you would need a lot of evaluation to prove out.

    Best,

    Jiashow

  • 0 in reply to Jiashow Ho
    TI__Intellectual 2985 points
    Hello Jiashow,

    Thanks for your replay.
    Can you estimate the sennsor dimension?

    Best regards,
    Tetsuro
  • 0 in reply to Shibuya
    TI__Genius 14270 points
    Hello Shibuya,

    For a 25mm sensing distance, we typically recommend a sensor >50mm in diameter. You should also consider using a reference sensor to compensate for environmental shifts. The sample rate that you desire is achievable with the LDC1612/4.

    Regards,

    ChrisO