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DLP801RE: Micromirror tilt angle

Part Number: DLP801RE

Tool/software:

Hello,

In the data sheet 6.10 Micromirror Array Optical Characteristics there is a range given for the micromirror tilt angle with respect to the plane formed by the overall micromirror array. Is there information on the typical distribution of this tilt angle? Are these min and max values the min or max ever measured or rather a 3 sigma confidence or such. Also does the tilt angle of individual micromirrors stay constant over the lifetime of the DMD?

Thanks,

Christian