MSP430FR5969-SP: Temperature sensor location

Do you mean the actual location on the die?

Yes

Maybe it is just me, but this sensor just isn't good enough for sub millimeter distances to matter.

Besides, doesn't the VQFN package have a thermal pad on the bottom? Making the distance from it to the top of the die the important dimension.

I was thinking that, but you could probably calibrate it if you really wanted to.

I was thinking that given the automated die layout tools, TI might not even *know* the location of the sensor. They just said "Place a diode with a connection to this multiplexer".