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DRV2667: problem with ripples on VDD input

Part Number: DRV2667


I'm driving the DRV2667 with a 5V-supply. While generating a sinusoidal signal on the output I'm generating quite big ripples on the 5V supply. Is this a known problem or is it based on errors in the circuit design? Prbably someone has an idea where they come from an how to get rid of them? I use 100nF capacitors close to VDD pin and on the supply side of the inductor which is connected to SW pin (see below).

I appreciate your help!

Best regards