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Hi Bea,
The exact composition will depend on the specific device you're interested in. I can't speak for the entire logic family at once (although you will see many similarities from one to another).
The exact material composition for any particular device is provided on our website -- the instructions to find this data are the same as the reliability data: https://e2e.ti.com/support/logic-group/logic/f/logic-forum/873626/faq-how-do-i-find-reliability-data-for-a-logic-device