SE556: SE556 or similar timer based PWM generator

Part Number: SE556
Other Parts Discussed in Thread: TLC555-Q1

Tool/software:

Hello

I'm wondering what's the best way to build a PWM generator (that modulates an AC signal into PWM waveform) using one of the TI timers? I need PWM frequency to be 1Mhz or even slightly higher. There's also a requirement for pulse width error, that I don't think feasible when the design based on a timer, so I'd say that I need it to be as low as possible.

Thanks